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Semiconductor/Display Dielectric Materials: Positive & Negative
Semiconductor/Display Dielectric Materials: Positive & Negative
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| Positive | Differentiated Points High heat resistance / high resolution achievable using Si polymers/KrF technology |
| Negative | Differentiated Points no-bias, no-stitch defects achievable using differentiated composition technology. |
| Item | Positive | Negative | |
| Viscosity | 〈 10 cPs | 〈 10 cPs | |
| EOP | 40mJ/cm2 | 30mJ/cm2 | 10um Mask just bias |
| Film retention | 〉90% | 〉70% | Final Thickness 2um |
